Pirani vacuum pressure sensor
The MKS Pirani pressure vacuum sensor is a vacuum sensor based on the thermal conductivity that measures the pressure by defining the heat loss of the heated conduit. This pressure sensor is a very robust and reliable vacuum sensor for measuring the vacuum quickly and reliably. Heat compensation circuits make the sensor highly reliable in full-scale measurement range.
The Piezo sensor utilizes the technology in which the effect of the pressure to the sensing element is converted into an electrical measurement value, which with an internal electronics within the sensor converts the desired output signal for the control system.
In the MKS Piezo sensor the pressure measurement technology, based on MEMS technology, is combined with a metal sealed stainless steel 316 diaphragm and integrated electronics. Piezo sensor enables economic and absolute measurements, regardless of the type of gas.
The Penning-type cold cathode ionization gauges use a cathode plate (with ground potential) and, generally, an annular anode, which is supplied with a voltage of several thousand volts. Due to cold emissions, the vacuum does not possess heat sources, such as, for example, those used in hot cathode ionization gauges. There are two magnets and an iron pin on the outer surface of cold cathode ionization gauges. These components are needed for ignition, as well as for ensuring the electricity conduction in the gas. Disorders caused by the magnetic field must be taken into account when choosing cold cathode ionization gauges, for example, when they are used in assemblies comprising electron beams.
Hot wire ionization gauges, which are also known as hot wire gauges or hot cathode gauges, are most commonly used for low-pressure (vacuum) measuring device 10−3 – 10−10 measurements.
MKS provides the best pressure measurement and pressure control in its Baratron® category capacitance manometers, dual range manometers, differential pressure sensors, and digital products suitable to measure pressure. Completely welded Inconel® sensors, included in our standard range, offer maximum protection against the effects of corrosive processing gases and also ensure a safe operating environment. User-specific pressure control products, process manometers, and pressure sensors are durable and robust, which in turn guarantees high performance, a long service life, and productivity.
MKS instruments 51C -serie pressure switchs provides good and reliable provides good and reliable protection for vacuum systems. Switches are designed specially for system in which electrical output -signal is not needed. These switches works as potentially free relays, which can be easily connected to different alarms, valve control, computer systems, process control, interlocks and other safety systems.