Edwards – A pioneer in vacuum pump technology

At Vacuumservice, we provide a comprehensive range of high-performance vacuum pumps designed and manufactured by Edwards – a global leader in vacuum technology and abatement solutions. Vacuum pumps remove gases from sealed environments and form the heart of any vacuum system.

Edwards pumps are trusted worldwide in demanding applications, from power generation to steel production. Edwards’ vacuum technology serves, among others, the electronics, chemical, pharmaceutical, coating, and research industries. All pumps are designed to be long-lasting, easy to service, and as environmentally friendly as possible.

Edwards offers a complete range of dry pumps, oil-sealed rotary vane pumps, turbomolecular pumps, and screw pumps for laboratories and demanding industrial processes. The solutions are quiet, energy-efficient, and reliable – designed for continuous operation and a clean vacuum. Explore our range of vacuum pumps from Edwards Vacuum below. You can also read more on the Edwards website.

Whether you’re looking for a standard solution or a fully customised system, we will help you find the perfect vacuum technology for your needs.

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Comprehensive Range of Dry Pumps for Every Application

Edwards' dry pumps offer an oil-free, quiet, and energy-efficient solution for laboratory and industrial use. The extensive range covers pumping speeds from a few cubic meters to over 25000 m³/h, so a suitable option can be found for both research environments and heavy-duty process applications.

Small Dry Pumps

The mXDS series is compact and lightweight (under 8 kg), easy to carry, and offers a pumping speed of 3 m³/h with an ultimate vacuum of 0.1 mbar. Ideal as a backing pump for turbomolecular pumps, as well as for freeze drying and laboratory use. Its oil-free design and low noise level make it both environmentally friendly and pleasant to operate.

The nXDS series offers pumping speeds from 6 to 20 m³/h. All models are hermetically sealed and completely oil-free, making them suitable for SEM applications, coating, distillation, drying, and helium leak testing.

C version: resistant to corrosive gases
R version: without gas ballast valve, suitable for gas recirculation

The XDS series (35–40 m³/h) is suitable for the same clean applications. Bearings operate at atmospheric pressure, significantly extending service intervals.

G version: without gas ballast valve

The nXRi series (30–120 m³/h) combines high performance with a compact footprint. Its oil-free and particle-free design ensures a clean working environment and low operating costs.

Diaphragm pumps (XDD1 and D-LAB) are oil-free, chemically resistant options for small-scale vacuum applications such as RGA, mass spectrometry, distillation, and gel drying processes.

Large (and SEMI) Dry Pumps

The iXH, iXM, and iXL series deliver clean, energy-efficient vacuum solutions for semiconductor and coating processes.

iXH: 100–5200 m³/h – designed for demanding SACVD, LPCVD, MOCVD, ALD, and EPI processes
iXM: 200–3000 m³/h – for medium-duty applications such as HDP-CVD, PECVD, and Etch
iXL: compact, energy-efficient models (110–930 m³/h) ideal for PVD and load lock applications

Industrial Dry Pumps – GXS, EDS, EXS & IDX Screw Mechanism Pumps

The GXS, EDS, EXS, and IDX series represent Edwards’ most advanced dry pump technology for industrial applications. Their robust screw mechanism ensures excellent particle and vapor handling, long service intervals, and outstanding reliability in demanding environments. These pumps deliver high performance with low energy consumption and minimal maintenance needs.

Typical applications include coating, drying, metallurgy, plasma processes, solar manufacturing, and vacuum packaging. When combined with Roots boosters, pumping speed and process efficiency are significantly increased.

Pumping speed: 160–3450 m³/h

Dry Pumps for the Chemical Industry

The EDP and CDX series are designed for demanding chemical and pharmaceutical processes such as distillation, filtration, and crystallization. Their oil-free design prevents process contamination and allows for ATEX-certified configurations.

The EDC Claw series utilizes a single-stage claw mechanism that withstands impurities and corrosive gases. Variable speed control enables significant energy savings.

Pumping speed: 65–300 m³/h
EDCi Plug & Play units: up to 1200 m³/h

Industrial Dry Pump EDS 300 ATEX System

EDS chemical vacuum pumps

The EDS series combines high pumping speeds with rapid pump-down times, ensuring reliable performance even in demanding chemical environments. Designed for flexibility and certified to meet global explosion-proof standards, these ATEX-compliant pumps deliver durable, configurable vacuum solutions for modern industrial needs.

Typical applications include lithium-ion battery production, distillation, solar crystal growth, fine chemicals, pharmaceuticals, petrochemicals, and processes involving flammable or corrosive gases, degassing, dewatering, filtration, and polymer or plastics manufacturing.

Edwards Oil-Sealed Rotary Vane Pumps for Laboratories and Industry

Edwards oil-sealed rotary vane pumps provide reliable vacuum solutions for a wide range of laboratory and industrial processes – including freeze drying, distillation, coating, vacuum furnaces, and as backing pumps for turbomolecular pumps.

The quiet and easy-to-use RV, E2, and EM series pumps are also available in Fomblin and ATEX-certified versions, with a comprehensive selection of spare parts and accessories.

Pumping performance can be enhanced with a Roots pump.

RV and E2 series: compact and versatile pumps for laboratories and analytical instruments.
Recommended oil: Ultragrade 15–19
EM series: powerful pumps for demanding industrial applications.
Recommended oil: Ultragrade 70

The new-generation ES series delivers a stable vacuum without pressure fluctuations. An integrated oil mist filter and efficient cooling minimize oil consumption and maximize service life.

Pumping speeds: 59–575 m³/h

Edwards Turbopumps – Performance for Every Application

Edwards’ nEXT series turbomolecular pumps offer a wide range of models, from nEXT55 to nEXT1230. Versatile control options and accessories make them an excellent choice for research and development applications. The redesigned rotor structure improves pumping speed and compression ratio, while hybrid bearings (ceramic + magnetic) ensure reliable and long-lasting operation. When combined with a TIC controller, the system can easily integrate backing pumps and other devices.

The STP Maglev series is designed for demanding and corrosive processes. Its fully magnetically levitated rotor provides vibration-free operation, flexible installation at any angle, and an extremely long—often maintenance-free—service life. Typical applications include analytical and microscopy instruments, UHV systems, sputtering, plasma etching, and various CVD processes. STP turbopumps can also replace diffusion pumps, reducing operating costs.

Turbo stations such as the T-Station and TIC series provide ready-to-use, modular solutions for laboratories and production environments. Delivered fully assembled on metal frames, they can be equipped with E2M, XDD, or mXDS backing pumps and up to three Edwards pressure gauges.

nEXT55, nEXT85, nEXT240, nEXT300, nEXT400, nEXT730, nEXT930, nEXT1230 Turbomolecular pumps range

Edwards Screw Pumps

Edwards’ advanced, ready-to-use EOSi series oil-lubricated screw vacuum pumps (400–1810 m³/h) deliver vacuum quietly, reliably, and with exceptional energy efficiency. The intelligent controller maintains the desired vacuum level while optimizing energy consumption, providing significant savings compared to traditional systems.

Their versatile applications range from central vacuum and pick-and-place systems to various packaging, drying, forming, and coating processes.

Complementary Pump Solutions from Edwards

Edwards’ range is complemented by special pumps that offer solutions for demanding and specific applications where conventional pumps are not sufficient. Liquid ring, Roots, ion, diffusion, cryo, and rotary piston pumps expand the possibilities of vacuum technology from laboratories to heavy industrial processes. Read more below.

Liquid Ring Pumps

– The Reliable Choice for Humid Processes

Edwards liquid ring pumps are designed for demanding applications where oil-sealed or dry pumps are not suitable. They efficiently handle wet gases and vapors, making them ideal for the wood, paper, chemical, and pharmaceutical industries, as well as for distillation, drying, and filtration processes. ATEX-certified versions are also available for use in hazardous environments.

Roots Pumps (Boosters)

– Power and Speed for Vacuum Processes

Roots pumps, also known as boosters, significantly increase the suction capacity of backing pumps and shorten pumping times. The Edwards EH series features a hydrokinetic drive that enables simultaneous pump start-up at atmospheric pressure, improving process efficiency and reducing mechanical load. ATEX-certified models are also available for industrial applications.

Ion Pumps

– The Purest Solution for Ultra-High Vacuum

Ion pumps use gas-binding technology to achieve ultra-high vacuum (UHV) without any moving parts. They operate completely vibration-free, contamination-free, and with exceptionally long service life, making them ideal for critical applications such as research and analytical systems. Edwards offers Gamma Vacuum TiTan, TSP, and NEG pumps, covering a wide range of vacuum levels and control options.

Diffusion Pumps

– Classic and Efficient Technology

Edwards’ long-standing expertise in diffusion pump technology is reflected in two product lines:

HT series – designed for heavy industrial applications such as metallurgy, distillation, and coating.
Diffstak series – a more compact solution for laboratories and research facilities.

Both series deliver reliable performance and outstanding cost efficiency.

Rotary Piston Pumps

– The Workhorse of Heavy Industry

Stokes rotary piston pumps are renowned for their long service life and exceptional reliability. They have been used for decades in demanding applications such as:

metallurgy
coating
drying
heat treatment

These pumps are ideal for environments requiring high suction capacity and superior mechanical durability.

CTI-Cryogenics

– Cryotechnology for Ultra-High Vacuum Control

CTI-Cryogenics cryopumps and compressors deliver exceptional performance and efficiency for ultra-high vacuum applications. These cryogenic solutions play a vital role in:

semiconductor manufacturing
research
development
space simulation

They combine energy efficiency, long service life, and superior cleanliness into one high-performance solution.

More information on Edwards’ website

Go to edwardsvacuum.com