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Do you want more information on vacuum sensors and vacuum gauges?

Kim Bergström

+358-9-774 55 312

kim.bergstrom@vacuumservice.fi

 

Janne Linnasaari

+358-9-774 55 315

janne.linnasaari@vacuumservice.fi

 
 

Vacuum sensors and vacuum gauges

We know which sensors, gauges, and display device combinations are best for your operation.

Whatever you need in the area of vacuum measurement, you will find just the right sensor, gauge, and display devices from us. Our selection includes a wide range of different options and our task is to find the right products and solutions for your application.

Depending on the vacuum, a variety of gauges are used, since different vacuum levels require that different techniques are used for measurement. From the operation of the vacuum system point of view, it is essential to know the current vacuum level.

We represent Pfeiffer and MKS's products, so our product range includes a wide selection of vacuum sensors and gauges; from standard atmospheric pressure to UHV-vacuum systems, i.e. all the way to space vacuums - or even a little further. Our sensors also use a number of different measurement techniques: Piezo, Pirani, cold cathode, hot cathode and capacitive sensors. And, of course, we can also find the controller units used in vacuum gauges.

Vacuumservice delivers only quality, so we represent the best products also among vacuum sensors and vacuum gauges. MKS is the world leader in gauges, and their product range is incredibly wide. Pfeiffer gauges are, in turn, among the cutting edge of Pirani sensors.

Did you know?

Vacuum gauges are used to measure pressure which is lower than ambient atmospheric pressure. Pressure = force per unit area. When pressure drops, the power decreases proportionally. A variety of gauges have been developed for different measurement areas, according to the intended use and the operating conditions. Pirani developed a pressure gauge based on the thermal conductivity in 1906, Buckley developed a hot cathode gauge in 1916 and Penning developed a cold cathode gauge in 1937.

 Pirani vacuum pressure sensor

The MKS 345 Standard Pirani pressure vacuum sensor is a vacuum sensor based on the thermal conductivity that measures the pressure by defining the heat loss of the heated conduit. This pressure sensor is a very robust and reliable vacuum sensor for measuring the vacuum quickly and reliably. Heat compensation circuits make the sensor highly reliable in full-scale measurement range.
 

 Piezo sensor

The Piezo sensor utilizes the technology in which the effect of the pressure to the sensing element is converted into an electrical measurement value, which with an internal electronics within the sensor converts the desired output signal for the control system.

In the MKS 902B Piezo sensor the pressure measurement technology, based on MEMS technology, is combined with a metal sealed stainless steel 316 diaphragm and integrated electronics. 902B enables economic and absolute measurements, regardless of the type of gas.

Cold cathode

The Penning-type cold cathode ionization gauges use a cathode plate (with ground potential) and, generally, an annular anode, which is supplied with a voltage of several thousand volts. Due to cold emissions, the vacuum does not possess heat sources, such as, for example, those used in hot cathode ionization gauges. There are two magnets and an iron pin on the outer surface of cold cathode ionization gauges. These components are needed for ignition, as well as for ensuring the electricity conduction in the gas. Disorders caused by the magnetic field must be taken into account when choosing cold cathode ionization gauges, for example, when they are used in assemblies comprising electron beams.

Hot cathode

Hot wire ionization gauges, which are also known as hot wire gauges or hot cathode gauges, are most commonly used for low-pressure (vacuum) measuring device 10−3 - 10−10 measurements.

 Capacitive sensors

MKS provides the best pressure measurement and pressure control in its Baratron® category capacitance manometers, dual range manometers, differential pressure sensors, and digital products suitable to measure pressure. Completely welded Inconel® sensors, included in our standard range, offer maximum protection against the effects of corrosive processing gases and also ensure a safe operating environment. User-specific pressure control products, process manometers, and pressure sensors are durable and robust, which in turn guarantees high performance, a long service life, and productivity.

 Pressure switches

MKS provides the best pressure measurement and pressure control in its Baratron® category capacitance manometers, dual range manometers, differential pressure sensors, and digital products suitable to measure pressure. Completely welded Inconel® sensors, included in our standard range, offer maximum protection against the effects of corrosive processing gases and also ensure a safe operating environment. User-specific pressure control products, process manometers, and pressure sensors are durable and robust, which in turn guarantees high performance, a long service life, and productivity.

Gauges and display devices

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