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Telemark
Telemark is a leading supplier of components
for evaporation systems, including water vapor
cryotraps, electron beam guns, E-beam power
supplies, optical instrumentation, and other
related accessories. The E-beam products were
developed in 1986 and transferred to the current
ownership in 1990.
www.tfi-telemark.com
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Telemark’s products include the widest
available range of E-beam sources, including
a new 15kW rotary hearth source with crucibles
to 6x100cc, 12x40cc, or a 1486 cc
trough. A choice of switching or tetrode-tube
regulated supplies ranging from 3kW to 15kW
is offered. The TVP series water vapor cryotraps
provide high-speed in-chamber water vapor
trapping, as well as heat removal up to 3.5kW.
Instrumentation offered includes a quartz
crystal deposition controller and a unique
and affordable in-situ optical spectrophotometer,
which provides optical thickness, physical
thickness, and color measurement capability,
as well as plasma diagnostics/endpoint.
Electron Beam Guns
Power Supplies
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