Intellevation

Intellevation brings together a team with many years experience in the design, build, testing and implementation of optical and crystal process monitoring and instrumentation equipment for the thin film coating and dry etching industries.

Intellevation’s Design & Development facility is based in Scotland, UK in Hillington’s Industrial Park close to Glasgow Airport and a network of major motorways.

www.intellemetrics.com

Optical laser monitors

The IL550 and IL560 Series of optical monitors are complete turnkey packages. Each package represents a fully integrated and fully automated hardware and software solution achieving the highest standards in performance and capability. Intellevation has been making the premier optical monitoring systems for the precision coating industry since 1987 and these products represent the culmination of this work.

Laser end point

If the plasma etch depth of your device is important, then you need the LEP400.

Within minutes the LEP400 can be fitted to just about any plasma etch machine that has a clear normal incidence view of the wafer being etched. This is usually through a small window port in the centre of the top electrode. Most modern etch machines come with such a central window as standard and most manufacturers will supply a modified electrode upon request. If you have any doubts about your particular plasma etch tool then feel free to contact us for advice.

 

Crystal controllers

Intellevation supplies a range of Quartz Crystal products for monitoring & controlling the growth of thin films. These products are designed to be either stand-alone or to be integrated into OEM vacuum growth systems.