Axic, Inc. was founded in 1980 as a company
to develop surface science equipment for the
semiconductor, electronics, and general scientific
community. The early stages of the company
were involved with determining future equipment
requirements for the semiconductor industry
which could be filled by a small company with
strategic knowledge of surface measurement
requirements.
www.axic.com
Thin film metrology
| Precision 1000-B |
| |
The Precision 1000-B®
readily analyzes compound thin films utilized
in semiconductor, superconductor, magnetic
and optical applications. |
| Reflex TT |
| |
Manually operated laser dark field
defect inspection tool. |
| Reflex AC |
| |
Automated defect inspection tool with
automatic open cassette platform. |
| Reflex AF |
| |
Automated, modular inspection systems
for 200 mm & 300 mm wafers. |
Rapid thermal prosessing
Rapid Thermal Annealing
Rapid Thermal Chemical Vapor Deposition
Tool
Low Pressure Chemical Vapor Deposition
Tool
Low cost MOCVD reactors for Research and
Development applications
Etch & Deposition
Plasmastar 200
Reactive ION Etcher / Photoresist Stripper
/ Plasma Surface Cleaning.
Mulimode HF-8- Electrode Configurations
Barrel Plasma Asher/RIE
Benchmark 800-II
RIE/PECVD Plasma Tool
Benchmark 800-III ICP
RIE/PECVD Plasma Tool
